PACK INCLUDING
- TRSCAN with 3 CNC Axes ( Z / X / Y )
- CCMP Line 1.92 mm or 4.8 mm
- 2 Screen TFT 19”
- Workstation Dell with Windows Seven 64 bits Ultimate
- Trimos Measurement and Trimos Analysis STT software
Application : Fast measuring for large area
For roughness in 3D and microtopography for all parts
The chromatic confocal line sensor TRIMOS CCML1 offers an incredibly fast 3D measurement of 384.000 points per second with nanometric scale resolution.
A robust and compact design, as well as outstanding dynamic range and an excellent signal to noise ratio, make the TRIMOS CCML1 the best measuring tool for all materials – including polished and highly tilted surfaces. With its unrivaled performance/price ratio, TRIMOS CCML1 is the best choice for ultrafast 3D inspection
| OPTICAL PROBE | CCM-L1 0.2 mm | CCM-L1 1 mm | CCM-L1 4 mm |
| Measuring range | 200 µm | 0.95 mm | 3.9 mm |
| Line length | 0.96 mm ± 0.01 mm | 1.91 mm ± 0.01 mm | 4.78 mm ± 0.02 mm |
| Lateral pitch (Y) | 5 µm | 10 µm | 25 µm |
| Working distance1) | 5.3 mm ± 0.2 mm | 18.5 mm ± 0.2 mm | 41 mm ± 0.2 mm |
| Spot diameter | 2 µm | 4 µm | 10 µm |
| Lateral resolution | 1 µm | 2 µm | 5 µm |
| Axial resolution (Z) | 20 nm | 80 nm | 320 nm |
| Accuracy 2) | ± 80 nm | ± 300 nm | ± 1.2 µm |
| Numerical aperture | 0.7 | 0.55 | 0.33 |
| Measurement angle to surface3) | 90°+/-44° | 90°+/-33° | 90°+/-20° |
| Thickness measuring range4) | 20 μm - 280 μm | 75 μm - 1.35 mm | 300 μm - 5.5 mm |
| Dimension length diameter | 70.4 mm / 37 mm | 93.3 mm / 54 mm | 120 mm / 58 mm |
1) bottom of optical probe to middle of measuring range
2) measurement on perpendicular mirror at 20°C
3) decreasing accuracy on the limits
4) refractive index n = 1.5