CCMP2
CHROMATIC CONFOCAL MICROSCOPY POINT - 2 TECHNOLOGY
Bigger numerical aperture (Slope)
Small vertical resolution and large numerical aperture allows for accurate measurements on all types of material. Ideal for non-contact measurement of topography and layer thickness.
TECHNICAL SPECIFICATIONS FOR CCMP2
An objective colour L projects the image of a point source W along a continuum of monochromatic images located on the optical axis ("colour coding").
A sample placed in the area of colour coding shows the surface diffuse the incident light brush.
Backscattered light through the lens colour L in the opposite direction and arrives at a hole P that filters all wavelengths except one, λM.
The collected light is analyzed by a spectrograph S. The position of the sample is directly related to the wavelength detected λM.
A wide range of sensor are available with this version. It also offers significant numerical aperture.
Chromatic confocal for distance & thickness
| OPTICAL PROBE | CL300 µm | CL1000 µm |
| Measuring Range | 300 µm | 1000 µm |
| Working distance1) | 4.5 mm | 19.1 mm |
| Resolution | 10 nm | 35 nm |
| Max slope 2) | +/-30° | +/- 45° |
| Lateral resolution | 2.5 µm | 1.8 µm |
| Numerial operture | 0.7 | 0.26 |
| Spot size | 5 µm | 3.5 µm |
1) Bottom of probe to middle of measuring range
2) Decrasing accuracy on the limits
At Refractive index n = 1.5