ECCO 95:
HIGH SPEED 3D SCANNING, ULTRA-HIGH RESOLUTION AND SUPERIOR IMAGE QUALITY
As the premium sensor series, the ECCO 95 sensors combine high resolution and measurement speed. This is made possible by the new sensor platform with innovative electronic design along with blue laser technology and a tailor-made optics. Particularly in the semiconductor, electronics and solar industries, the ECCO 95.010 delivers impressive results.
PROPERTIES & BENEFITS
High Speed 3D scanning – For faster production lines & throughput
Ultra-High Resolution – Resolve extremely fine features
Superior 3D Image Quality – Best repeatability under challenging conditions
ECCO 95.010 | ECCO 95.020 | ECCO 95.040 | ECCO 95.100 | ECCO 95.200 | |
Typical field of view (near | mid | far) (1) | 10.5 | 11 | 11.5 mm | 22 | 25 | 28 mm | 34 | 36 | 38 mm | 72 | 98 | 124 mm | 125 | 190 | 280 mm |
Typical measurement range (1) | 5 mm | 16 mm | 16 mm | 100 mm | 250 mm |
Stand-off distance | 23.5 mm | 63 mm | 55 mm | 150 mm | 325 mm |
Typical vertical resolution (Z) (1) | 0.37-0.45 μm | 1.1 – 1.6 µm | 1.4-1.8 μm | 5 – 12 µm | 12-50 μm |
Typical lateral resolution (Y) (1) | 5.8-6.8 μm | 11.5 – 14.5 µm | 18-20 μm | 42 – 70 µm | 66-138 μm |
Z-linearity (2), (5) | 0.015 % | 0.005% | 0.006% | 0.002% | 0.015 % |
Z-repeatability (4), (5) | 0.1 µm | 0.2 µm | 0.4 μm | 2 µm | 3.3 μm |
weight | Approx. 650g | Approx. 650g | Approx. 490 g | Approx. 490 g | Approx. 490 g |
part numbers | 3.002.152 (2M) | 3.004.151 (3R) | 3.003.152 (3B) | 3.002.151 (2M) | 3.004.151 (3R) | 3.003.151 (3B) | 3.002.153 (2M) | 3.004.153 (3R) | 3.003.153 (3B) | 3.002.150 (2M) | 3.004.150 (3R) | 3.003.150 (3B) | 3.006.154 (2M) | 3.008.154 (3R) | 3.007.154 (3B) |
Maximum points / 3D profile | 1920 | ||||
Typical scan rate (3) | Approx. from 1 kHz up to 10 kHz | ||||
Typical 3D point rate (3) | Approx. from 0.7 up to 15 million points/sec | ||||
Interface | Gigabit Ethernet ( 1 Gbit/ sec) | ||||
Inputs | 2x Inputs (5 – 24 VDC)Quadrature Encoder (AB-Channel, RS-422 standard) | ||||
Outputs | 2 x Outputs, 24 VDC (max. 20 mA) | ||||
Trigger | START Trigger support on Input 1 – 2 DATA Trigger support on Quadrature Encoder Input (Max. DATA trigger rate: 1 MHz) DATA Trigger support on Input 2 (Max. DATA trigger rate: 10 kHz) | ||||
Input voltage | Power | 24 VDC, ± 15 % ripple | 8.5 W | ||||
Laser wavelength | 450 nm | 660nm red laser | |||
Laser class (standard | optional) | 2M | 3R | ||||
Maximum ambient light | 10,000 lx | ||||
EMC test | as per EN 61 000-6-2, EN 61 000-6-4 | ||||
Vibration/ Shock test | as per EN 60 086-2-6, -27, -29, -64 | ||||
Electrical safety | as per EN 61 010-1-3 | ||||
Protection class | III, as per EN 61 040-3 | ||||
Enclosure rating | IP65 | ||||
Air humidity | Maximum 90%, non-condensing | ||||
Temperature (operation | storage) | 0 – 40° C | -20 – 70° C | ||||
Compatible accessories | Power-I/O-Encoder cable: 6.320.0XXEthernet cable: 6.303.0XX |
(1) Typical values can vary up to 5% due to optical tolerances
(2) Z-Linearity calculated as a variation of “bias” (reference value vs. measured value) over the measurement range
(3) Scan rate & point rate are dependent on the configured field of view, measurement range and exposure time. A ‘scan’ by definition considers maximum points/3D profile i.e. full FOV. The typical scan/point rate range has been estimated considering an exposure time of 1 µsec, min-max MR and full FOV. The typical scan rate can be further boosted by windowing the FOV
(4) Experimentally assessed by scanning a fixed measurement target 4100 times successively within short time interval. No post-processing filters applied
(5) Measurements performed on a SmartRay standard artifact which is an aluminium flat matt surface painted matte white