CCML
CHROMATIC CONFOCAL MICROSCOPY LINE TECHNOLOGY
Fast 3D topography
The chromatic confocal line sensor offers an incredibly fast 3D measurement of 384.000 points per second for a very wide range of applications.
TECHNICAL SPECIFICATIONS FOR CCML1 ( 3D LINE )
The chromatic confocal line sensor TRIMOS CCML1 offers an incredibly fast 3D measurement of 384.000 points per second with nanometric scale resolution.
A robust and compact design, as well as outstanding dynamic range and an excellent signal to noise ratio, make the TRIMOS CCML1 the best measuring tool for all materials – including polished and highly tilted surfaces. With its unrivaled performance/price ratio, TRIMOS CCML1 is the best choice for ultrafast 3D inspection
| OPTICAL PROBE | CCM-L1 0.2 mm | CCM-L1 1 mm | CCM-L1 4 mm |
| Measuring range | 200 µm | 0.95 mm | 3.9 mm |
| Line length | 0.96 mm ± 0.01 mm | 1.91 mm ± 0.01 mm | 4.78 mm ± 0.02 mm |
| Lateral pitch (Y) | 5 µm | 10 µm | 25 µm |
| Working distance1) | 5.3 mm ± 0.2 mm | 18.5 mm ± 0.2 mm | 41 mm ± 0.2 mm |
| Spot diameter | 2 µm | 4 µm | 10 µm |
| Lateral resolution | 1 µm | 2 µm | 5 µm |
| Axial resolution (Z) | 20 nm | 80 nm | 320 nm |
| Accuracy 2) | ± 80 nm | ± 300 nm | ± 1.2 µm |
| Numerical aperture | 0.7 | 0.55 | 0.33 |
| Measurement angle to surface3) | 90°+/-44° | 90°+/-33° | 90°+/-20° |
| Thickness measuring range4) | 20 μm - 280 μm | 75 μm - 1.35 mm | 300 μm - 5.5 mm |
| Dimension length diameter | 70.4 mm / 37 mm | 93.3 mm / 54 mm | 120 mm / 58 mm |
1) bottom of optical probe to middle of measuring range
2) measurement on perpendicular mirror at 20°C
3) decreasing accuracy on the limits
4) refractive index n = 1.5